Publications

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Filters: Author is Michael L. Rieger and First Letter Of Title is E  [Clear All Filters]
2011
J. - Y. Wuu, Pikus, F. G., Marek-Sadowska, M., and Rieger, M. L., “Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching”, in Design for Manufacturability through Design-Process Integration V, 2011, vol. 7974.