- Vertical Slit Field Effect Transistor in ultra-low power applications
- Can pin access limit the footprint scaling?
- A Low Energy Network-on-Chip Fabric for 3-D Multi-Core Architectures
- Investigation of emerging middle-of-line poly gate-to-diffusion contact reliability issues
- Variation-aware electromigration analysis of power/ground networks
- Power Delivery for Multicore Systems
- Layout effects in fine grain 3D integrated regular microprocessor blocks
Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching
Title | Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching |
Publication Type | Conference Paper |
Year of Publication | 2011 |
Authors | Wuu, J-Y, Pikus, FG, Marek-Sadowska, M, Rieger, ML |
Conference Name | Design for Manufacturability through Design-Process Integration V |
Publisher | SPIE |
URL | http://link.aip.org/link/?PSI/7974/79740U/1 |
DOI | 10.1117/12.879546 |