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Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching
| Title | Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching |
| Publication Type | Conference Paper |
| Year of Publication | 2011 |
| Authors | Wuu, J-Y, Pikus, FG, Marek-Sadowska, M, Rieger, ML |
| Conference Name | Design for Manufacturability through Design-Process Integration V |
| Publisher | SPIE |
| URL | http://link.aip.org/link/?PSI/7974/79740U/1 |
| DOI | 10.1117/12.879546 |
